Residual Gas Analysis
Internal Water Vapor Content
In order to eliminate failures in microelectronic
components caused by chemical reaction (corrosion), the internal
gas composition of the component must be known. MIL-STD-883, Method
1018.5 is generally the accepted specification for internal water
vapor content. This method defines procedures for RGA equipment
calibration and device testing, as well as the maximum acceptable
limits for water vapor content.
RGA is useful for more than moisture content analysis. SEAL
Laboratories' RGA system can detect all masses up to
100 AMU, allowing common gasses to be identified and quantified. Samples
of process atmospheres and unusual sealing environments can be analyzed
to detect the evolution or resorption of gasses. The system software can
determine moisture content as well as an entire spectrum of gasses in
In addition to providing routine RGA analysis, SEAL
Laboratories staff has the technical expertise to identify the
origin of the "problem" internal gasses and provide corrective
action on an as-needed basis.
DIP's, Quad Packs, TO-x Cans, Metal Lidded Devices, Filler Gas Containers
and many other geometries can be analyzed.
0.01cc to 25cc volumes can be analyzed. Precision radiographic and computer
modeling techniques are used to determine the volume of a package
All gases with molecular weights between 1-100 mass units can be identified
with a survey scan, or up to 16 components can be preselected for quantitative
Nitrogen, Oxygen, Argon, Carbon Dioxide, Moisture, Hydrogen, Helium, Fluorocarbons,
Methane, and Ammonia are measured and reported.
more information on RGA analysis contact:
Dr.Arun Kumar or